Atmel Clean Room Process Exhaust

Clean Room Process Heat Exhaust System

ATMEL Corporation, Colorado Springs, Colorado

This project involved the design of a process heat exhaust systems to serve equipment in two separate class 100 clean rooms.  The existing clean rooms had air handling units with supply air ductwork above the ceiling supplying air to HEPA filter panels.  Return air was then transferred back up to the air handling units through the utility tunnels.  The design involved separate exhaust systems for each clean room.  The systems were designed to exhaust 14,000 CFM and 18,000 CFM with redundant exhaust fans on each system. Approximately 20,000 CFM was removed from the scrubber exhaust system thereby allowing for future expansion on each system.  This was a fast track project in which we provided performance requirements to the owner to pre-purchase the exhaust fans and ductwork while the contractors were bidding the installation phase of the project.

Clean Room Scrubber Exhaust System

ATMEL Corporation, Colorado Springs, Colorado

The project involved design to expand a wet scrubber exhaust system to serve equipment in a class 100 clean room.  The clean room design utilized a supply air plenum above the ceiling with a return air plenum below the floor.  FRP ductwork was utilized in the mechanical room and outside on the roof.  Lined stainless steel ductwork was utilized in the return air plenum for flexibility in connecting equipment to the system.  The design was to accommodate present and future requirements for an additional 20,000 CFM of which 8,000 CFM capacity was required for new equipment on order.  This was a fast track project in which we provided a ductwork layout to the owner to pre-purchase the ductwork while the contractors were bidding the installation phase of the project.  This project was completed in approximately 75 days from the start of design to the end of construction.